Journal article
Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs



Publication Details
Authors:
Hillmer, H.
Publication year:
2003
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
Pages range:
918-928
Volume number:
9
Start page:
918
End page:
928
ISSN:
1077-260X

Abstract
Tunable vertical cavity devices including an air-gap integrated in the cavity have been designed, fabricated, and investigated. The ultrawide wavelength tuning is realized by mi-cromechanical actuation of Bragg mirror membranes. Based on optical and mechanical model calculations, the air-gap filters and vertical cavity surface emitting lasers (VCSELs) are designed for investigating mainly the optical tuning efficiency. In our research, we focus on two different mirror material systems, dielectric Si3N4/SiO2 and InP/air-gap Bragg mirrors and on two tuning concepts, respectively. For the dielectric mirrors, continuous tuning is achieved by thermal actuation of the Si3N4/SiO2 mirror membranes, and for InP/air-gap mirrors, electrostatic actuation of the InP membranes is used. To verify the optical and mechanical simulations, InP/air-gap filters are characterized by measuring reflectance spectra and the tuning behavior. The measured results agree with the simulations used to optimize the micromechanical and optical characteristics of air-gap filters and VCSELs for optical communication applications.


Authors/Editors

Last updated on 2019-01-11 at 16:05

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