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Failure stress of epitaxial silicon thin films
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Journal article
Failure stress of epitaxial silicon thin films
Publication Details
Authors
:
Käsewieter, J.; Kajari-Schröder, S.; Niendorf, T.; Brendel, R.
Publication year
:
2013
Journal
:
Energy Procedia
Pages range
:
926-932
Volume number
:
38
ISSN
:
1876-6102
DOI
:
http://dx.doi.org/10.1016/j.egypro.2013.07.366
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Last updated on 2021-27-01 at 07:50