Journal article
Characterization of the bonding structure of nanocrystalline diamond and amorphous carbon films prepared by plasma assisted techniques



Publication Details
Authors:
Popov, C.
Publication year:
2007
Journal:
Applied Physics A: Materials Science and Processing
Pages range:
209-212
Volume number:
89
Start page:
209
End page:
212
ISSN:
0947-8396

Abstract
Thin nanocrystalline diamond/amorphous carbon (NCD/a-C) composite films and amorphous diamond-like carbon (DLC) films were prepared by three methods: microwave plasma chemical vapour deposition (MWCVD) from methane/nitrogen mixtures (NCD/a-C), RF magnetron sputtering of a pure graphite target in argon/methane ambients, and pulsed laser deposition (PLD) in vacuum or argon atmosphere (DLC). The films prepared by the three techniques were comprehensively characterized with respect to their bonding structure by Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS).


Authors/Editors

Last updated on 2019-01-11 at 16:06