Journal article
High resolution 3D NanoImprint technology: Template fabrication, application in Fabry--Pérot-filter-array-based optical nanospectrometers



Publication Details
Authors:
Wang, X.; Albrecht, A.; Mai, H.; Woidt, C.; Meinl, T.; Hornung, M.; Bartels, M.; Hillmer, H.
Publication year:
2013
Journal:
Microelectronic Engineering
Pages range:
44-51
Volume number:
2013
Issue number:
110
ISSN:
0167-9317



Keywords
3D NanoImprint lithography, High resolution template, Optical 5MEMS6, Spectrometry

Last updated on 2019-25-07 at 15:03