Journal article
Nitrogen rich carbon nitride thin films deposited by hybrid PLD technique



Publication Details
Authors:
Popov, C.
Publication year:
2002
Journal:
Molecular Crystals and Liquid Crystals
Pages range:
207-210
Volume number:
374
Start page:
207
End page:
210
ISSN:
1058-725X

Abstract
Highly nitrogenated CNx films were created by pulsed laser deposition (PLD), combined with radiofrequency (RF) and hollow cathode (HC) discharges. The N/C ratio higher than 1 was measured. Deposition set-up and results of optical measurement are discussed.


Authors/Editors

Last updated on 2019-25-07 at 15:50