Journal article
Plasma ion source for in situ ion bombardment in a soft x-ray magnetic scattering diffractometer



Publication Details
Authors:
Lengemann, D.; Engel, D.; Ehresmann, A.
Publication year:
2012
Journal:
Review of Scientific Instruments
Pages range:
053303
Volume number:
83
ISSN:
0034-6748

Abstract
A new plasma ion source for in situ keV He ion bombardment of solid state samples or thin films was designed and built for ion fluences between 1 × 1012 and 1 × 1017 ions/cm2. The system was designed to be mounted to different diffraction chambers for soft x-ray resonant magnetic scattering. Without breaking the vacuum due to He-ion bombardment, structural and magnetic modifications of the samples can be studied in situ and element specifically.


Research Areas


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