Journal article
Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution



Publication Details
Authors:
Meijer, J.; Pezzagna, S.; Burchard, B.; Bukow, H.; Rangelow, I.; Sarov, Y.; Plümel, I.; Wrachtrup, J.; Schmidt-Kaler, F.; Schnitzler, W.; Singer, K.
Publication year:
2008
Journal:
Applied Physics A
Pages range:
567
Volume number:
91
ISSN:
0947-8396



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