Journal article
Fabrication of Nanopillars on Nanocrystalline Diamond Membranes for the Incorporation of Color Centers



Publication Details
Authors:
Schmidt, A.; Bernardoff, J.; Singer, K.; Reithmaier, J.; Popov, C.
Publisher:
WILEY‐VCH Verlag GmbH & Co. KGaA
Place:
Weinheim
Publication year:
2019
Journal:
Physica Status Solidi (A)
Pages range:
1900233
Title of series:
Phys. Status Solidi A
Volume number:
2019
ISSN:
1862-6300
Languages:
English

Abstract

A fabrication process of dense arrays of one‐dimensional diamond
nanostructures (diamond nanopillars) integrated on nanocrystalline
diamond (NCD) membranes is implemented with an etched‐through marker
hole in the membrane in the center of the array. NCD films deposited on
silicon substrates are used as starting material. The main fabrication
steps consist of structuring the NCD film by electron beam lithography
(EBL) applying aluminum as a hard mask and subsequent inductively
coupled O2 plasma reactive ion etching (ICP RIE), followed by
structuring of the silicon substrate from the backside to open a NCD
membrane. The developed fabrication procedure for nanostructured
membranes can be transferred to monocrystalline diamond and implemented
for deterministic single ion implantation into the nanopillars for
generation of nitrogen‐vacancy (NV) or silicon‐vacancy (SiV) centers.
For this purpose, the etched marker hole can be applied for alignment in
the implantation process. Such diamond nanostructures with integrated
color centers could play an important role in the development of novel
quantum memory devices.


Last updated on 2019-06-06 at 10:57