Iwajlo Rangelow - Forschungsinformationssystem | Universität Kassel - CONVERIS Forschungsinformationsystem

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Dr. Dipl.-Ing. Iwajlo Rangelow

Projektbeteiligungen

01/1994	Trockenätzen von Indiumphosphid
01/1992	In-Situ-Analyse von Plasma-Ätzprozessen
01/1992	Mikrostrukturierung
01/1992	Sensoren für die Raster-Sondenmikroskopie
01/1992	Si-Membranen für Mikromechanische Anwendungen
01/1992	Simulation von Plasmaätzprozessen

Publikationen

2008	Meijer, J., Pezzagna, S., Burchard, B., Bukow, H., Rangelow, I., Sarov, Y., Plümel, I., Wrachtrup, J., Schmidt-Kaler, F., Schnitzler, W., Singer, K.T.T., 2008. Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution. Applied Physics A 91, 567. https://doi.org/10.1007/s00339-008-4515-1
2004	Rabinovych, O., Pedrak, R., Maniak, M., Rühling, H., Rangelow, I., 2004. NANOJET as a chemical scalpel for accessing the internal 3D-structure of biological cells. Microelectronic Engineering 73-4, 843–846. https://doi.org/10.1016/S0167-9317(04)00231-X
2001	Rangelow, I., 2001. Thermal nano-probe. Microelectronic Engineering 57-8, 737–748. https://doi.org/10.1016/S0167-9317(01)00466-X
2000	Rangelow, I., 2000. Piezoresistive sensors for scanning probe microscopy. Ultramicroscopy 82, 39–48. https://doi.org/10.1016/S0304-3991(99)00171-0
1999	Volland, B., Rangelow, I., 1999. Dry etching with gas chopping without rippled sidewalls. Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 17, 2768–2771. https://doi.org/10.1116/1.591061
1999	Rangelow, I., 1999. NANOJET: Nanostructuring via a downstream plasmajet. Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 17, 2764–2767. https://doi.org/10.1116/1.591060