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    Dipl.-Phys. Burkhard Volland



    Publications
    1999
    Volland, B., Rangelow, I., 1999. Dry etching with gas chopping without rippled sidewalls. Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 17, 2768–2771. https://doi.org/10.1116/1.591061

    Last updated on 2017-22-11 at 17:23

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