Journal article
Precise structure measurement using laser-based microellipsometry
Publication Details
Authors: | Holzapfel, W. |
Publication year: | 1999 |
Journal: | tm - Technisches Messen |
Pages range : | 455-462 |
Volume number: | 66 |
Start page: | 455 |
End page: | 462 |
ISSN: | 0171-8096 |
eISSN: | 2196-7113 |
DOI-Link der Erstveröffentlichung: |
URN / URL: |
Abstract
We investigated ref lection-ellipsometric methods for high-resolution surface measurement. The topography and the material distribution are determined simultaneously by combinative evaluation of the light polarization. Scanning the surface, the focused measurement beam of a novel PSA-ellipsometer (microellipsometer) delivers the local distributions of four ellipsometric parameters. They are used to calculate the local gradient angles and the complex material refraction index. We successfully carried out tests on various surfaces.
We investigated ref lection-ellipsometric methods for high-resolution surface measurement. The topography and the material distribution are determined simultaneously by combinative evaluation of the light polarization. Scanning the surface, the focused measurement beam of a novel PSA-ellipsometer (microellipsometer) delivers the local distributions of four ellipsometric parameters. They are used to calculate the local gradient angles and the complex material refraction index. We successfully carried out tests on various surfaces.
