Aufsatz in einer Fachzeitschrift
Capacitance humidity sensor with carbon nitride detecting element
Details zur Publikation
Autor(inn)en: | Popov, C. |
Publikationsjahr: | 2000 |
Seitenbereich: | 603-606 |
Jahrgang/Band : | 70 |
Erste Seite: | 603 |
Letzte Seite: | 606 |
ISSN: | 0947-8396 |
Zusammenfassung, Abstract
The humidity sensitive properties of carbon nitride (CNx) films deposited by two methods, inductively coupled plasma chemical vapour deposition utilizing transport reactions and pulsed laser deposition combined with an rf discharge, have been investigated. For this purpose capacitance humidity sensors with a CNx detecting element have been fabricated and tested. Fast and significant responses toward moisture are registered by the changes of the electrical parameters. The CNx films sensing mechanism has been discussed. The results obtained show unambiguously that CNx films appear to be a promising candidate as a humidity sensitive element in up-to-date electronic noses.
The humidity sensitive properties of carbon nitride (CNx) films deposited by two methods, inductively coupled plasma chemical vapour deposition utilizing transport reactions and pulsed laser deposition combined with an rf discharge, have been investigated. For this purpose capacitance humidity sensors with a CNx detecting element have been fabricated and tested. Fast and significant responses toward moisture are registered by the changes of the electrical parameters. The CNx films sensing mechanism has been discussed. The results obtained show unambiguously that CNx films appear to be a promising candidate as a humidity sensitive element in up-to-date electronic noses.
