Journal article
An improved method for point deflection measurements on rectangular membranes
Publication Details
Authors: | Merle, B.; Nicholson, K.; Herbert, E.; Göken, M. |
Publisher: | ELSEVIER SCI LTD |
Publication year: | 2016 |
Journal: | Materials & Design |
Pages range : | 485-491 |
Volume number: | 109 |
Start page: | 485 |
End page: | 491 |
Number of pages: | 7 |
ISSN: | 0264-1275 |
eISSN: | 1873-4197 |
DOI-Link der Erstveröffentlichung: |
Abstract
In this work, the recent theoretical advances for evaluating point deflection experiments are reviewed and further refined. An improved experimental approach based on measuring the contact stiffness during nanoindentation is implemented and applied to the evaluation of the residual stress in SiNx and gold membranes. The accuracy of the point deflection experiments is assessed by evaluating the same set of samples with the bulge test reference technique and comparing the residual stress results. It is shown that the new experimental method greatly improves the reproducibility of the measurement and that the updated evaluation scheme leads to a more reliable residual stress value. (C) 2016 Elsevier Ltd. All rights reserved.
In this work, the recent theoretical advances for evaluating point deflection experiments are reviewed and further refined. An improved experimental approach based on measuring the contact stiffness during nanoindentation is implemented and applied to the evaluation of the residual stress in SiNx and gold membranes. The accuracy of the point deflection experiments is assessed by evaluating the same set of samples with the bulge test reference technique and comparing the residual stress results. It is shown that the new experimental method greatly improves the reproducibility of the measurement and that the updated evaluation scheme leads to a more reliable residual stress value. (C) 2016 Elsevier Ltd. All rights reserved.
Keywords
Bulge test, Continuous stiffness measurement, Nanoindentation, Point deflection, Residual stress, Thin film
