Journal article
Mechanical characterization of metallic thin films by bulge and scratch testing
Publication Details
Authors: | Javed, H.; Merle, B.; Preiß, E.; Hivet, R.; Benedetto, A.; Göken, M. |
Publisher: | ELSEVIER SCIENCE SA |
Publication year: | 2016 |
Journal: | Surface and Coatings Technology |
Pages range : | 69-74 |
Volume number: | 289 |
Start page: | 69 |
End page: | 74 |
Number of pages: | 6 |
ISSN: | 0257-8972 |
eISSN: | 1879-3347 |
DOI-Link der Erstveröffentlichung: |
Abstract
The mechanical properties of 20-nm thick silver, titanium and nickel-chromium alloy films encapsulated between two silicon nitride ceramic layers are investigated by bulge and scratch tests. Bulge tests are used in order to measure the yield strength of the metallic films. An unexpected strain-softening behavior is observed for a silver sample, which is rationalized as a measurement artifact due to the delamination of the film from its substrate. An experimental workaround is proposed and shown to yield correct measurements. The adhesion strength of the metallic films is measured by scratch tests, and their failure mechanism is characterized by in situ optical observations. All in all, the poorest mechanical properties are found in the silver. This is probably due to a combination of the low adhesion at the interface between the nitride and the metal and the low yield stress of the silver. (C) 2016 Elsevier B.V. All rights reserved.
The mechanical properties of 20-nm thick silver, titanium and nickel-chromium alloy films encapsulated between two silicon nitride ceramic layers are investigated by bulge and scratch tests. Bulge tests are used in order to measure the yield strength of the metallic films. An unexpected strain-softening behavior is observed for a silver sample, which is rationalized as a measurement artifact due to the delamination of the film from its substrate. An experimental workaround is proposed and shown to yield correct measurements. The adhesion strength of the metallic films is measured by scratch tests, and their failure mechanism is characterized by in situ optical observations. All in all, the poorest mechanical properties are found in the silver. This is probably due to a combination of the low adhesion at the interface between the nitride and the metal and the low yield stress of the silver. (C) 2016 Elsevier B.V. All rights reserved.
Keywords
Bulge test, Scratch test, Silicon nitride, Silver, Thin film
