Contribution in edited book
Measurement of Surface Topography and Material by Micro-Ellipsometry
Publication Details
Authors: | Neuschaefer-Rube, U.; Holzapfel, W.; Doberitzsch, J. |
Editor: | International Measurement Confederation (IMEKO) |
Publisher: | IMEKO |
Place: | Osaka, Japan |
Publication year: | 1999 |
Pages range : | 63-69 |
Book title: | Proceedings of the XV IMEKO World Congress, June 13-18, Vol. XI |
ISBN: | 4-907764-08-1 |
