Journal article
Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications
Publication Details
Authors: | Worapattrakul, N.; Tatzel, A.; Viereck, V.; Hillmer, H. |
Publication year: | 2020 |
Journal: | Micro and Nano Systems Letters |
Pages range : | 1-6 |
Volume number: | 20 |
Issue number: | 8 |
ISSN: | 2213-9621 |
eISSN: | 2213-9621 |
DOI-Link der Erstveröffentlichung: |
